The principles of the holographic lithography technique are reviewed, and the ability in the formation of structures with different periods by the holographic lithography technique in SZ2080 is demonstrated. The influence of laser exposure, phase shift between interfering laser beams, and the used laser wavelength on the structures fabricated by the four-beam interference technique has been studied. It is shown that by using the interfering beams with a different phase is it possible to reduce the period of the structure √2 times compared to the four interfering beams of the same phase. Fabrication of micro-structures by the holographic lithography technique can be realized via multi-photon and single-photon polymerization processes. The structures created by these two techniques are compared. Finally, in the experiments with the five-beam interference, the double-period effect was observed by adding the zero-order beam with a low intensity. The fabricated periodic micro-structures have the potential to be used as a scaffold for cell growth and micro-optics.

Keywords: holographic lithography, four-beam interference, SZ2080, periodic micro-structures, multi-photon polymerization, double-period effect
PACS: 02.50.Tt, 82.35.-x, 85.40.Hp

PERIODINIŲ MIKRODARINIŲ FORMAVIMAS HOLOGRAFINĖS LITOGRAFIJOS BŪDU
E. Stankevičius^a, M. Gedvilas^a, B. Voisiat^a, M. Malinauskas^b, G. Račiukaitis^a
aFizinių ir technologijos mokslų centras, Vilnius, Lietuva
^bVilniaus universiteto Lazerinių tyrimų centras, Vilnius, Lietuva

Straipsnyje apžvelgiami holografinės litografijos principai ir demonstruojamos holografinės litografijos galimybės suformuoti įvairaus periodo mikrodarinius SZ2080 fotopolimere. Taip pat aptariama įvairių lazerinio proceso parametrų – ekspozicijos trukmės, interferuojančių pluoštų bangos ilgio, fazės poslinkio tarp interferuojančių pluoštų – įtaka formuojamiems dariniams ir pademonstruotas dvigubo periodo efektas. Šis efektas atsiranda, kai prie keturių identiškų pirmo difrakcinio maksimumo pluoštų yra pridedamas mažo intensyvumo centrinis pluoštas (~7 kartus mažesnis už pirmo difrakcinio maksimumo pluoštą), tuomet suformuoto periodinio mikrodarinio kas antras stulpelis yra plonesnis už šalia esantį stulpelį. Formuojant pakankamai aukštus mikrodarinius (~60 μm) plonesni stulpeliai ryškinimo proceso metu sugriūna ir yra išplaunami, lieka tik storesni stulpeliai. Tokiu būdu galima padvigubinti formuojamo mikrodarinio periodą nemažinant intensyvumo pluoštų persiklojimo zonoje. Šis efektas gali būti labai naudingas daugiafotoniškai formuojant didelio periodo struktūras.
Holografinės litografijos būdu suformuoti periodiniai mikrodariniai gali būti panaudoti biomedicinoje kaip karkasai kamieninėms ląstelėms auginti, mikrofluidikoje – kontroliuoti skysčių ar dujų tekėjimą.

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