Single-layer mixture coatings of ZrO₂–SiO₂ and Nb₂O₅–SiO₂ produced by the ion beam sputtering (IBS) deposition technique were investigated in detail. Effective medium approximation (EMA) models and two non-optical methods, namely Rutherford backscattering spectroscopy (RBS) and X-ray photoelectron spectroscopy (XPS) were applied for characterization of elemental composition of these films. The comparison of obtained results indicates discrepancies in atomic material concentrations. The reasons and potential sources of such discrepancies are discussed qualitatively and indicate limitations of optical models.

Keywords: optical coatings, composite thin films, ion beam sputtering
PACS: 42.79.Wc, 78.66.Sq, 81.15.Cd

EFEKTYVIOSIOS TERPĖS TEORIJŲ ĮVERTINIMAS Nb₂O₅–SiO₂ IR ZrO₂–SiO₂ MIŠINIUOSE, UŽGARINTUOSE JONAPLUOŠČIO DULKINIMO TECHNOLOGIJA
T. Tolenis^a, M. Gaspariūnas^a, M. Lelis^b, A. Plukis^a, R. Buzelis^a, A. Melninkaitis^c
aValstybinis mokslinių tyrimų institutas Fizinių ir technologijos mokslų centras, Vilnius, Lietuva
^bVilniaus universiteto Lazerinių tyrimų centras, Vilnius, Lietuva
^cLietuvos energetikos institutas, Kaunas, Lietuva

Darbe išsamiai ištirtos vienasluoksnės ZrO₂–SiO₂ ir Nb₂O₅–SiO₂ dangos, užgarintos naudojant jonapluoščio dulkinimo technologiją. Nustatant cheminę sudėtį buvo pasinaudota trimis nepriklausomomis metodikomis: efektyviosios terpės aproksimacija, Rezerfordo atgalinės sklaidos spektroskopija ir Rentgeno spindulių fotoelektronų spektroskopija. Tiesiogiai lyginant gautus rezultatus buvo pastebėta metodikų netikslumų. Tokių netikslumų priežastys atsiranda dėl netobulos stechiometrijos, bandinių užterštumo ir skirtingos medžiagos būsenos dangose. Įvertinta, kad Lorenco-Lorenzo modelis tinka nustatyti greitą ir apytikslią medžiagų koncentraciją, bet atliekant tikslesnę analizę būtini kiti metodai.

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