Received 5 May 2014; revised 10 June 2014; accepted 23 September
2014
FONONŲ PALAIKOMA ELEKTRONŲ IR
VAKANSIJŲ PORŲ SUSIDARYMO KINETIKA DVIEJŲ JUOSTŲ MODELYJE
Šiame darbe pateikiami mūsų
tyrimų rezultatai, formuojant stačiakampio skerspjūvio kanalus
tūriniame lydytame kvarce. Selektyvus cheminis ėsdinimas kvarce
buvo inicijuojamas apšvita femtosekundiniu lazeriu. Lazeriu
modifikuotos bandinio sritys buvo lokaliai išėsdinamos fluoro
rūgštimi. Pasiūlytas naujas metodas mikrokanalų su norimu
skerspjūviu formavimui, panaudojant daugkartinį kanalo
skenavimą. Buvo ištirta cheminio ėsdinimo selektyvumo
priklausomybė nuo lazerio spindulio skenavimo greičio, lazerio
impulso energijos ir poliarizacijos ir aptariami galimi
modifikavimo procesai, sukeliantys nemonotonišką selektyvumo
kitimą.
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