[PDF]  https://doi.org/10.3952/physics.v59i4.4138

Open access article / Atviros prieigos straipsnis
Lith. J. Phys. 59, 224–232 (2019)
 

NONSTOICHIOMETRIC TIN OXIDE FILMS: STUDY BY X-ray DIFFRACTION, RAMAN SCATTERING AND ELECTRON PARAMAGNETIC RESONANCE
  Dzmitry V. Adamchuka,b, Vitaly K. Ksenevicha, Nikolai A. Poklonskia, Marius Navickasb, and Jūras Banysb
 aFaculty of Physics, Belarusian State University, Nezalezhnastsi Ave. 4, 220030 Minsk, Belarus
bFaculty of Physics, Vilnius University, Saulėtekio 9, 10222 Vilnius, Lithuania
Email: ksenevich@bsu.by

Received 18 October 2019; accepted 31 October 2019

Nonstoichiometric SnO/SnO2/SnO2−δ films were fabricated by DC magnetron sputtering and reactive DC magnetron sputtering of tin target with further 2-stage temperature annealing of synthesized materials. X-ray diffraction analysis, Raman spectroscopy and electron paramagnetic resonance (EPR) spectroscopy were employed to study the influence of oxygen content in the plasma during the sputtering process and the temperature of annealing on the stoichiometric and phase composition of synthesized films. It was found that the tin monoxide phase prevailed in the films fabricated by DC magnetron sputtering in the argon plasma followed by a 2-stage annealing process. Nanocrystalline films containing both tin monoxide and tin dioxide were synthesized when reactive magnetron sputtering with a small content of oxygen (of about 1 vol.%) was used. The increase of oxygen content in the plasma to the value of about 2 vol.% leads to the formation of amorphous films. The intensity of the Raman peaks inherent in SnO2 vibration modes was found to depend on the content of the tin monoxide phase in the films. This effect can be attributed to the dissipative transition of electronic excitation from tin monoxide to tin dioxide nanocrystallites.
Keywords: tin oxides, magnetron sputtering, X-ray diffraction, resonance Raman scattering, electron paramagnetic resonance
PACS: 68.55.Nq, 73.61.Le, 78.30.-j, 81.15.Cd


NESTECHIOMETRINĖS ALAVO OKSIDO PLĖVELĖS: RENTGENO SPINDULIŲ DIFRAKCIJOS, RAMANO SKLAIDOS IR ELEKTRONŲ PARAMAGNETINIO REZONANSO TYRIMAI
Dzmitry V. Adamchuka,b, Vitaly K. Ksenevicha, Nikolai A. Poklonskia, Marius Navickasb, Jūras Banysb

aBaltarusijos valstybinio universiteto Fizikos fakultetas, Minskas, Baltarusija
bVilniaus universiteto Fizikos fakultetas, Vilnius, Lietuva
 
Nestechiometrinės SnO/SnO2/SnO2−δ plėvelės buvo gaminamos nuolatinės srovės (DC) magnetroninio ir reaktyviojo DC magnetroninio dulkinimo būdu, panaudojant alavo bandinį bei gautą medžiagą kaitinant dvejomis pakopomis. Siekiant ištirti deguonies kiekio plazmoje, naudotoje magnetroninio dulkinimo metu, bei kaitinimo temperatūros įtaką bandinių stechiometrinei ir fazinei struktūrai, buvo panaudota Rentgeno struktūrinė analizė, Ramano ir elektronų paramagnetinio rezonanso (EPR) spektroskopijos. Nustatyta, kad bandiniuose, gautuose nuolatinės srovės magnetroninio dulkinimo būdu argono plazmoje, panaudojant dviejų pakopų kaitinimą dominuoja alavo monoksido fazė. Nanokristalinės plėvelės, savyje turinčios tiek alavo monoksido, tiek alavo dioksido, buvo susintetintos reaktyviuoju nuolatinės srovės dulkinimo būdu, panaudojant mažą kiekį deguonies (1 vol%). Deguonies padidėjimas plazmoje iki ~2 vol% skatina amorfinių plėvelių formavimąsi. Nustatyta, kad Ramano spektrų intensyvumai, nusakantys SnO2 vibracines modas, priklauso nuo alavo monoksido kiekio plėvelėse. Šis reiškinys gali būti siejamas su elektroninio sužadinimo sukeltu disipaciniu virsmu iš alavo monoksido į alavo dioksido nanokristalitus.

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